BERNHARD, Paul; HOFMANN, Manfred; SCHULTHESS, Adrian; STEINMANN, Bettina. Taking Lithography to the Third Dimension. CHIMIA, [S. l.], v. 48, n. 9, p. 427, 1994. DOI: 10.2533/chimia.1994.427. Disponível em: https://www.chimia.ch/chimia/article/view/1994_427. Acesso em: 29 apr. 2024.