SCHAEDELI, Ulrich; TINGUELY, Eric. Microlithographic Layers. CHIMIA, [S. l.], v. 48, n. 9, p. 431, 1994. DOI: 10.2533/chimia.1994.431. Disponível em: https://www.chimia.ch/chimia/article/view/1994_431. Acesso em: 4 may. 2024.